Denis Robitaille

Person

  • Ipswich, MA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Ion source with tailored extraction shape

    • Patent number 10,714,296
    • Issue date Jul 14, 2020
    • Axcelis Technologies, Inc.
    • Patrick T. Heres
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum system cold trap filter

    • Patent number 8,450,701
    • Issue date May 28, 2013
    • Axcelis Technologies, Inc.
    • William P. Reynolds
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

  • Information Patent Application

    ION SOURCE WITH TAILORED EXTRACTION APERTURE SHAPE

    • Publication number 20200194219
    • Publication date Jun 18, 2020
    • Axcelis Technologies Inc.
    • Patrick T. Heres
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum System Cold Trap Filter

    • Publication number 20120267546
    • Publication date Oct 25, 2012
    • Axcelis Technologies, Inc.
    • William P. Reynolds
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL