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Denis Shamiryan
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Heverlee, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Cleaning of plasma chamber walls using noble gas cleaning step
Patent number
7,964,039
Issue date
Jun 21, 2011
IMEC
Adam Michal Urbanowicz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selective epitaxial growth of source/drain areas
Patent number
7,799,664
Issue date
Sep 21, 2010
IMEC
Peter Verheyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma composition for selective high-k etch
Patent number
7,598,184
Issue date
Oct 6, 2009
IMEC
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective removal of rare earth based high-k materials in a semicon...
Patent number
7,521,369
Issue date
Apr 21, 2009
Interuniversitair Microelektronica Centrum (IMEC)
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning of doped poly-silicon gates
Patent number
7,390,708
Issue date
Jun 24, 2008
Interuniversitair Microelektronica Centrum (IMEC) VZW
Marc Demand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for characterization of porous films
Patent number
6,662,631
Issue date
Dec 16, 2003
Interuniversitair Microelektronica Centrum
Mikhail Rodionovich Baklanov
G01 - MEASURING TESTING
Information
Patent Grant
Method to produce a porous oxygen-silicon layer
Patent number
6,593,251
Issue date
Jul 15, 2003
Interuniversitair Microelektronica Centrum (IMEC)
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FABRICATION OF POROGEN RESIDUES FREE AND MECHANICALLY ROBUST LOW-K...
Publication number
20110006406
Publication date
Jan 13, 2011
IMEC
Adam Michal Urbanowicz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLEANING OF PLASMA CHAMBER WALLS USING NOBLE GAS CLEANING STEP
Publication number
20090065025
Publication date
Mar 12, 2009
Interuniversitair Microelektronica Centrum vzw (IMEC)
Adam Michal Urbanowicz
B08 - CLEANING
Information
Patent Application
SELECTIVE REMOVAL OF RARE EARTH BASED HIGH-K MATERIALS IN A SEMICON...
Publication number
20080096374
Publication date
Apr 24, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING OF DOPED POLY-SILICON GATES
Publication number
20080096372
Publication date
Apr 24, 2008
Interuniversitair Microelektronica Centrum (IMEC)
Marc Demand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for selective epitaxial growth of source/drain areas
Publication number
20070148860
Publication date
Jun 28, 2007
Peter Verheyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma for patterning advanced gate stacks
Publication number
20070099428
Publication date
May 3, 2007
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma composition for selective high-k etch
Publication number
20070099403
Publication date
May 3, 2007
Denis Shamiryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of sealing low-k dielectrics and devices made thereby
Publication number
20060022348
Publication date
Feb 2, 2006
Thomas Joseph Abell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of sealing low-k dielectrics and devices made thereby
Publication number
20050287826
Publication date
Dec 29, 2005
Thomas Joseph Abell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method to produce a porous oxygen-silicon layer
Publication number
20030181066
Publication date
Sep 25, 2003
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for characterization of porous films
Publication number
20030094032
Publication date
May 22, 2003
Mikhail Rodionovich Baklanov
G01 - MEASURING TESTING
Information
Patent Application
Method to produce a porous oxygen-silicon layer
Publication number
20020022378
Publication date
Feb 21, 2002
Mikhail Baklanov
H01 - BASIC ELECTRIC ELEMENTS