Denis Syomin

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for pattern collapse free wet processing of se...
- Patent number 8,440,573
- Issue date May 14, 2013
- Lam Research Corporation
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PATTERN COLLAPSE FREE WET PROCESSING OF SE...
- Publication number 20110183522
- Publication date Jul 28, 2011
- LAM RESEARCH CORPORATION
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF PREVENTING PATTERN COLLAPSE USING LOW SURFACE...
- Publication number 20110139183
- Publication date Jun 16, 2011
- Katrina Mikhaylichenko
- H01 - BASIC ELECTRIC ELEMENTS