Denise Marie Puisto

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Milton, VT, US

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Patents Grantslast 30 patents

Information Patent Grant
Correction of pattern-dependent errors in a particle beam lithograp...
- Patent number 6,177,680
- Issue date Jan 23, 2001
- International Business Machines Corporation
- Gregory J. Dick
- G05 - CONTROLLING REGULATING
Information Patent Grant
Liquid immersion heating process for substrate temperature uniformity
- Patent number 5,716,763
- Issue date Feb 10, 1998
- International Business Machines Corporation
- Douglas Earl Benoit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern specific calibration for E-beam lithography
- Patent number 5,424,548
- Issue date Jun 13, 1995
- International Business Machines Corp.
- Denise M. Puisto
- H01 - BASIC ELECTRIC ELEMENTS