Dennis Herman, Caspar VAN BANNING

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Best, NL

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Patents Grantslast 30 patents

Information Patent Grant
Substrate positioning device with remote temperature sensor
- Patent number 12,051,607
- Issue date Jul 30, 2024
- ASML Netherlands B.V.
- Patriek Adrianus Alphonsus Maria Bruurs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam inspection apparatus
- Patent number 11,942,340
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of cooling objective lens of a charged-particle...
- Patent number 11,764,027
- Issue date Sep 19, 2023
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam inspection apparatus
- Patent number 11,430,678
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus
- Patent number 11,385,556
- Issue date Jul 12, 2022
- ASML Netherlands B.V.
- Dennis Herman Caspar Van Banning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection tool and method of controlling heat load
- Patent number 11,158,484
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Dennis Herman Caspar Van Banning
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20240258138
- Publication date Aug 1, 2024
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
- Publication number 20230205101
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Luuc KEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20220415678
- Publication date Dec 29, 2022
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POSITIONING DEVICE WITH REMOTE TEMPERATURE SENSOR
- Publication number 20210272829
- Publication date Sep 2, 2021
- ASML NETHERLANDS B.V.
- Patriek Adrianus Alphonsus Maria BRUURS
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE BEAM APPARATUS
- Publication number 20210132513
- Publication date May 6, 2021
- ASML NETHERLANDS B.V.
- Dennis Herman Caspar VAN BANNING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM INSPECTION TOOL AND METHOD OF CONTROLLING HEAT LOAD
- Publication number 20200203117
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Dennis Herman Caspar VAN BANNING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF COLLING OBJECTIVE LENS OF A CHARGED-PARTICLE...
- Publication number 20200176215
- Publication date Jun 4, 2020
- ASML NETHERLANDS B.V.
- Jeroen Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20200027763
- Publication date Jan 23, 2020
- ASML Netherlands B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS

Dennis Herman, Caspar VAN BANNING

Person

Patents Grantslast 30 patents

Substrate positioning device with remote temperature sensor

Particle beam inspection apparatus

Systems and methods of cooling objective lens of a charged-particle...

Particle beam inspection apparatus

Particle beam apparatus

Electron beam inspection tool and method of controlling heat load

Patents Applicationslast 30 patents

PARTICLE BEAM INSPECTION APPARATUS

APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS

PARTICLE BEAM INSPECTION APPARATUS

SUBSTRATE POSITIONING DEVICE WITH REMOTE TEMPERATURE SENSOR

PARTICLE BEAM APPARATUS

ELECTRON BEAM INSPECTION TOOL AND METHOD OF CONTROLLING HEAT LOAD

SYSTEMS AND METHODS OF COLLING OBJECTIVE LENS OF A CHARGED-PARTICLE...

PARTICLE BEAM INSPECTION APPARATUS