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Dennis Kemperman
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Voorhout, NL
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last 30 patents
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Patent Grant
Support structure for wafer table
Patent number
9,146,480
Issue date
Sep 29, 2015
MAPPER LITHOGRAPHY IP B.V.
Pieter Kappelhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SUPPORT STRUCTURE FOR WAFER TABLE
Publication number
20130063712
Publication date
Mar 14, 2013
Pieter Kappelhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY