Dennis Koosau

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Hayward, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck having a plurality of heater coils
- Patent number 8,663,391
- Issue date Mar 4, 2014
- Applied Materials, Inc.
- Alexander Matyushkin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for etching high aspect ratio features
- Patent number 8,475,625
- Issue date Jul 2, 2013
- Applied Materials, Inc.
- Sharma Pamarthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with electrostatic chuck having dual temperature...
- Patent number 8,226,769
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Alexander Matyushkin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for thermal control of a semiconductor substrate
- Patent number 6,466,426
- Issue date Oct 15, 2002
- Applied Materials Inc.
- Yeuk-Fai Edwin Mok
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK HAVING A PLURALITY OF HEATER COILS
- Publication number 20120285619
- Publication date Nov 15, 2012
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES
- Publication number 20070256785
- Publication date Nov 8, 2007
- Sharma Pamarthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH ELECTROSTATIC CHUCK HAVING DUAL TEMPERATURE...
- Publication number 20070258186
- Publication date Nov 8, 2007
- APPLIED MATERIALS, INC.
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS