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Dennis VAN DEN BERG
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Substrate holder for use in a lithographic apparatus
Patent number
11,448,976
Issue date
Sep 20, 2022
ASML Netherlands B.V.
Thomas Poiesz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
Publication number
20240248411
Publication date
Jul 25, 2024
ASML NETHERLANDS B.V.
Cornelius Maria ROPS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS
Publication number
20220357675
Publication date
Nov 10, 2022
ASML NETHERLANDS B.V.
Thomas POIESZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS
Publication number
20210165334
Publication date
Jun 3, 2021
ASML NETHERLANDS B.V.
Thomas POIESZ
H01 - BASIC ELECTRIC ELEMENTS