Dennis W. Cobb

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Lake Arrowhead, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for EUV plasma source target delivery
- Patent number 7,838,854
- Issue date Nov 23, 2010
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for EUV plasma source target delivery
- Patent number 7,405,416
- Issue date Jul 29, 2008
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for EUV plasma source target delivery
- Publication number 20080283776
- Publication date Nov 20, 2008
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for EUV plasma source target delivery
- Publication number 20060192154
- Publication date Aug 31, 2006
- Cymer, Inc.
- J. Martin Algots
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Discharge produced plasma EUV light source
- Publication number 20040160155
- Publication date Aug 19, 2004
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR