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DeogJa KOO
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Yongin-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Plasma apparatus and method of fabricating semiconductor device usi...
Patent number
9,490,107
Issue date
Nov 8, 2016
Samsung Electronics Co., Ltd.
Moojin Kim
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
PLASMA APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USI...
Publication number
20150325413
Publication date
Nov 12, 2015
MOOJIN KIM
H01 - BASIC ELECTRIC ELEMENTS