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Derek G. Aqui
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San Jose, CA, US
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last 30 patents
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Patent Grant
Self aligning vacuum seal assembly
Patent number
5,773,841
Issue date
Jun 30, 1998
High Yield Technology, Inc.
Derek Aqui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to detect non-spherical particles using orthogonally polariz...
Patent number
5,637,881
Issue date
Jun 10, 1997
High Yield Technology, Inc.
Raymond Burghard
G01 - MEASURING TESTING
Information
Patent Grant
Quasi bright field particle sensor
Patent number
5,606,418
Issue date
Feb 25, 1997
High Yield Technology, Inc.
Peter G. Borden
G01 - MEASURING TESTING
Information
Patent Grant
Particle monitor for throttled pumping systems
Patent number
5,534,706
Issue date
Jul 9, 1996
High Yield Technology, Inc.
Peter G. Borden
G01 - MEASURING TESTING
Information
Patent Grant
Modular particle monitor for vacuum process equipment
Patent number
5,436,465
Issue date
Jul 25, 1995
High Yield Technology, Inc.
Peter G. Borden
G01 - MEASURING TESTING
Information
Patent Grant
In situ real time particle monitor for a sputter coater chamber
Patent number
5,347,138
Issue date
Sep 13, 1994
High Yield Technology
Derek G. Aqui
G01 - MEASURING TESTING