Derek M. Dispensa

Follow

Person

Methuen, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Supercritical phase wafer drying/cleaning system
- Patent number 6,067,728
- Issue date May 30, 2000
- G.T. Equipment Technologies, Inc.
- Robert B. Farmer
- H01 - BASIC ELECTRIC ELEMENTS