Derk Jan Wilfred Klunder

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Geldrop, NL

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Patents Applicationslast 30 patents

Information Patent Application
Radiation system and lithographic apparatus comprising the same
- Publication number 20080074655
- Publication date Mar 27, 2008
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G01 - MEASURING TESTING
Information Patent Application
Optical element, lithographic apparatus including such an optical e...
- Publication number 20060145094
- Publication date Jul 6, 2006
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G02 - OPTICS