Derrick A. Shaughnessy

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 11,913,874
- Issue date Feb 27, 2024
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 10,969,328
- Issue date Apr 6, 2021
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for co-located metrology
- Patent number 10,804,167
- Issue date Oct 13, 2020
- KLA-Tencor Corporation
- David Y. Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 10,215,688
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Systems for providing illumination in optical metrology
- Patent number 10,203,247
- Issue date Feb 12, 2019
- KLA-Tencor Corporation
- Gregory R. Brady
- F21 - LIGHTING
Information Patent Grant
Confined illumination for small spot size metrology
- Patent number 10,006,865
- Issue date Jun 26, 2018
- KLA-Tencor Corporation
- Derrick Shaughnessy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Confined illumination for small spot size metrology
- Patent number 9,719,932
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Derrick Shaughnessy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for providing illumination in optical metrology
- Patent number 9,512,985
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 9,400,246
- Issue date Jul 26, 2016
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Metrology systems and methods for high aspect ratio and large later...
- Patent number 8,860,937
- Issue date Oct 14, 2014
- KLA-Tencor Corp.
- Thaddeus Gerard Dziura
- G01 - MEASURING TESTING
Information Patent Grant
System and method for nondestructively measuring concentration and...
- Patent number 8,804,106
- Issue date Aug 12, 2014
- KLA-Tencor Corporation
- NanChang Zhu
- G01 - MEASURING TESTING
Information Patent Grant
System and method for performing photothermal measurements and rela...
- Patent number 8,111,399
- Issue date Feb 7, 2012
- KLA-Tencor Corporation
- Lawrence D. Rotter
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...
- Publication number 20250005435
- Publication date Jan 2, 2025
- KLA Corporation
- Houssam Chouaib
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...
- Publication number 20250004384
- Publication date Jan 2, 2025
- KLA Corporation
- Zhaxylyk Kudyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...
- Publication number 20250004047
- Publication date Jan 2, 2025
- KLA Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Measurement Of Semiconductor Structures Bas...
- Publication number 20240151770
- Publication date May 9, 2024
- KLA Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
- Publication number 20210223166
- Publication date Jul 22, 2021
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Co-Located Metrology
- Publication number 20200243400
- Publication date Jul 30, 2020
- KLA-Tencor Corporation
- David Y. Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20190195782
- Publication date Jun 27, 2019
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Systems for Providing Illumination in Optical Metrology
- Publication number 20170146399
- Publication date May 25, 2017
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20170016815
- Publication date Jan 19, 2017
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
Systems for Providing Illumination in Optical Metrology
- Publication number 20140240951
- Publication date Aug 28, 2014
- KLA-Tencor Corporation
- Gregory R. Brady
- G02 - OPTICS
Information Patent Application
Optical Metrology Tool Equipped with Modulated Illumination Sources
- Publication number 20130169966
- Publication date Jul 4, 2013
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR NONDESTRUCTIVELY MEASURING CONCENTRATION AND...
- Publication number 20130003050
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- NanChang Zhu
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELA...
- Publication number 20100328670
- Publication date Dec 30, 2010
- KLA-Tencor Technologies Corporation
- Lawrence D. Rotter
- G01 - MEASURING TESTING

Derrick A. Shaughnessy

Person

Patents Grantslast 30 patents

Optical metrology tool equipped with modulated illumination sources

Optical metrology tool equipped with modulated illumination sources

Methods and systems for co-located metrology

Optical metrology tool equipped with modulated illumination sources

Systems for providing illumination in optical metrology

Confined illumination for small spot size metrology

Confined illumination for small spot size metrology

Systems for providing illumination in optical metrology

Optical metrology tool equipped with modulated illumination sources

Metrology systems and methods for high aspect ratio and large later...

System and method for nondestructively measuring concentration and...

System and method for performing photothermal measurements and rela...

Patents Applicationslast 30 patents

METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...

METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...

METROLOGY IN THE PRESENCE OF CMOS UNDER ARRAY (CUA) STRUCTURES UTIL...

Methods And Systems For Measurement Of Semiconductor Structures Bas...

OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES

Methods And Systems For Co-Located Metrology

Optical Metrology Tool Equipped with Modulated Illumination Sources

Systems for Providing Illumination in Optical Metrology

Optical Metrology Tool Equipped with Modulated Illumination Sources

Systems for Providing Illumination in Optical Metrology

Optical Metrology Tool Equipped with Modulated Illumination Sources

SYSTEM AND METHOD FOR NONDESTRUCTIVELY MEASURING CONCENTRATION AND...

SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELA...