Detlef Wolter

Person

  • Jenapriessnitz, DE

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Method and apparatus for inspecting a wafer

    • Publication number 20070076943
    • Publication date Apr 5, 2007
    • Vistec Semiconductor Systems Jena GmbH
    • Joachim Wienecke
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    Optical measurement arrangement

    • Publication number 20040169868
    • Publication date Sep 2, 2004
    • LEICA MICROSYSTEMS JENA GmbH
    • Matthias Slodowski
    • G01 - MEASURING TESTING