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Detlef Wolter
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Jenapriessnitz, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Measurement system with an optical measurement arrangement
Patent number
7,277,190
Issue date
Oct 2, 2007
Vistec Semiconductor Systems Jena GmbH
Matthias Slodowski
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for monitoring the light emitted from an illum...
Patent number
6,456,373
Issue date
Sep 24, 2002
Leica Microsystems Jena GmbH
Joachim Wienecke
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for inspecting a wafer
Publication number
20070076943
Publication date
Apr 5, 2007
Vistec Semiconductor Systems Jena GmbH
Joachim Wienecke
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Optical measurement arrangement
Publication number
20040169868
Publication date
Sep 2, 2004
LEICA MICROSYSTEMS JENA GmbH
Matthias Slodowski
G01 - MEASURING TESTING