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Detlev Mueller
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Ellwangen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Optical system of an illumination device of a projection exposure a...
Patent number
8,068,279
Issue date
Nov 29, 2011
Carl Zeiss SMT GmbH
Karl-Heinz Schuster
G02 - OPTICS
Information
Patent Grant
Optical element unit for exposure processes
Patent number
7,545,483
Issue date
Jun 9, 2009
Carl Zeiss SMT AG
Bernhard Gellrich
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Optical element unit for exposure processes
Publication number
20080192215
Publication date
Aug 14, 2008
Carl Zeiss SMT AG
Bernhard Gellrich
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM OF AN ILLUMINATION DEVICE OF A PROJECTION EXPOSURE A...
Publication number
20070217013
Publication date
Sep 20, 2007
Carl Zeiss SMT AG
Karl-Heinz Schuster
G02 - OPTICS