Deven Raj

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Middleton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Closed loop process control of plasma processed materials
- Patent number 8,728,587
- Issue date May 20, 2014
- Varian Semiconductor Equipment Associates, Inc.
- George Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed loop control and process optimization in plasma doping proce...
- Patent number 7,586,100
- Issue date Sep 8, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Deven M. Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CLOSED LOOP PROCESS CONTROL OF PLASMA PROCESSED MATERIALS
- Publication number 20120328771
- Publication date Dec 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- George Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Closed Loop Control And Process Optimization In Plasma Doping Proce...
- Publication number 20090200461
- Publication date Aug 13, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Deven M. Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGE NEUTRALIZATION IN A PLASMA PROCESSING APPARATUS
- Publication number 20090084987
- Publication date Apr 2, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUSES FOR PROVIDING ELECTRICAL CONTACT FOR PLASMA...
- Publication number 20080160212
- Publication date Jul 3, 2008
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS