Devendra Kumar

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Los Altos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device having porous structu...
- Patent number 6,949,456
- Issue date Sep 27, 2005
- ASM Japan K.K.
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulation film on semiconductor substrate and method for forming same
- Patent number 6,881,683
- Issue date Apr 19, 2005
- ASM Japan K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing system and methods for forming low-k dielectric...
- Patent number 6,838,115
- Issue date Jan 4, 2005
- FSI International, Inc.
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing chamber for heating and cooling wafer-like objects
- Patent number 6,423,947
- Issue date Jul 23, 2002
- FSI International, Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing chamber for heating and cooling wafer-like objects
- Patent number 6,307,184
- Issue date Oct 23, 2001
- FSI International, Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor device having porous structure
- Publication number 20050179135
- Publication date Aug 18, 2005
- ASM JAPAN K.K.
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor device having porous structu...
- Publication number 20040087133
- Publication date May 6, 2004
- ASM JAPAN K.K.
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing system and methods for forming low-k dielectric...
- Publication number 20040047993
- Publication date Mar 11, 2004
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Insulation film on semiconductor substrate and method for forming same
- Publication number 20030162408
- Publication date Aug 28, 2003
- ASM JAPAN K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal processing system and methods for forming low-k dielectric...
- Publication number 20020132052
- Publication date Sep 19, 2002
- Devendra Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing chamber for heating and cooling wafer-like objects
- Publication number 20010040155
- Publication date Nov 15, 2001
- FSI International Inc.
- Jeffrey D. Womack
- H01 - BASIC ELECTRIC ELEMENTS