Devendra Kumar

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Los Altos Hills, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma pre-treating surfaces for atomic layer deposition
- Patent number 7,498,242
- Issue date Mar 3, 2009
- ASM America, Inc.
- Devendra Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma pre-treating surfaces for atomic layer deposition
- Publication number 20060216932
- Publication date Sep 28, 2006
- Devendra Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of CVD chamber cleaning
- Publication number 20060151002
- Publication date Jul 13, 2006
- Devendra Kumar
- B08 - CLEANING