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DEZAN YANG
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Shenyang, CN
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Patents Grants
last 30 patents
Information
Patent Grant
Automatic wafer carrying system and method for transferring wafer u...
Patent number
12,131,938
Issue date
Oct 29, 2024
PIOTECH INC.
Hualong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer support pin lifting device
Patent number
11,990,363
Issue date
May 21, 2024
PIOTECH INC.
Dezan Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER PROCESSING DEVICE, WAFER PROCESSING SYSTEM AND CONTROL METHOD
Publication number
20240203775
Publication date
Jun 20, 2024
JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
Ren ZHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
Publication number
20230274957
Publication date
Aug 31, 2023
PIOTECH CO., LTD.
HUAQIANG TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER SUPPORT PIN LIFTING DEVICE
Publication number
20220208595
Publication date
Jun 30, 2022
PIOTECH INC.
Dezan Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC WAFER CARRYING SYSTEM AND METHOD FOR TRANSFERRING WAFER U...
Publication number
20210407843
Publication date
Dec 30, 2021
PIOTECH INC.
Hualong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
Publication number
20200203197
Publication date
Jun 25, 2020
PIOTECH CO., LTD.
HUAQIANG TAN
H01 - BASIC ELECTRIC ELEMENTS