Dezheng SUN

Follow

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for diffraction pattern guided source mask opt...
- Patent number 11,846,889
- Issue date Dec 19, 2023
- ASML Netherlands B.V.
- Duan-Fu Stephen Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MATCH THE ABERRATION SENSITIVITY OF THE METROLOGY MARK AND THE DEVI...
- Publication number 20240319581
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Duan-Fu Stephen HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DIFFRACTION PATTERN GUIDED SOURCE MASK OPT...
- Publication number 20220179325
- Publication date Jun 9, 2022
- ASML NETHERLANDS B.V.
- Duan-Fu Stephen HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR TRAINING MACHINE LEARNING MODEL FOR COMPUTATION LITHOGR...
- Publication number 20200380362
- Publication date Dec 3, 2020
- ASML NETHERLANDS B.V.
- Yu CAO
- G06 - COMPUTING CALCULATING COUNTING