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Dhirendra Prasad Mathur
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Monroe, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Integrated cooling substrate for extreme ultraviolet reticle
Patent number
6,806,006
Issue date
Oct 19, 2004
International Business Machines Corporation
Michael J. Lercel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
Integrated cooling substrate for extreme ultraviolet reticle
Publication number
20040009410
Publication date
Jan 15, 2004
International Business Machines Corporation
Michael J. Lercel
B82 - NANO-TECHNOLOGY