Dhritiman Subha Kashyap

Person

Indira Nagar, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Gas mixer
- Patent number D1080812
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Youngki Chang
- D23 - Environmental heating and cooling
Information Patent Grant
Thermal shield for processing chamber
- Patent number 12,308,218
- Issue date May 20, 2025
- Applied Materials, Inc.
- Youngki Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution plate
- Patent number D1037778
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Ashutosh Agarwal
- D07 - Equipment for preparing or serving food or drink not elsewhere specified
Information Patent Grant
Heater assembly with purge gap control and temperature uniformity f...
- Patent number 11,818,810
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer heater with backside and integrated bevel purge
- Patent number 11,769,684
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal heater for spatial multi-wafer processing tool
- Patent number 11,682,576
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally uniform deposition station
- Patent number 11,584,993
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Machine learning based smart process recipe builder to improve azim...
- Patent number 11,586,789
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Gas distribution plate for thermal deposition
- Patent number 11,583,816
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Showerhead with inlet mixer
- Patent number 11,549,183
- Issue date Jan 10, 2023
- Applied Materials, Inc.
- Ashutosh Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatial wafer processing with improved temperature uniformity
- Patent number 11,479,855
- Issue date Oct 25, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal heater for spatial multi-wafer processing tool
- Patent number 11,430,686
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution plate for thermal deposition
- Patent number 11,110,425
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Multi-station chamber lid with precise temperature and flow control
- Patent number 11,098,404
- Issue date Aug 24, 2021
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal management system
- Patent number 10,910,243
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Spatial wafer processing with improved temperature uniformity
- Patent number 10,787,739
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery
- Patent number 9,447,499
- Issue date Sep 20, 2016
- Novellus Systems, Inc.
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cascade design showerhead for transient uniformity
- Patent number 9,353,439
- Issue date May 31, 2016
- Lam Research Corporation
- Dhritiman S. Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CROSS FLOW GAS DELIVERY FOR PARTICLE REDUCTION
- Publication number 20250191897
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD DESIGN FOR PLASMA-ENHANCED DEPOSITION
- Publication number 20250122622
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Youngki Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE DEGAS STATION
- Publication number 20250069915
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Thomas BREZOCZKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DEGAS STATION
- Publication number 20250069914
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Thomas BREZOCZKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Showerhead Assembly with Heated Showerhead
- Publication number 20240068096
- Publication date Feb 29, 2024
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY
- Publication number 20240068095
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Youngki Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL SHIELD FOR PROCESSING CHAMBER
- Publication number 20230282454
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Youngki Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Heater With Backside And Integrated Bevel Purge
- Publication number 20230113057
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MACHINE LEARNING BASED SMART PROCESS RECIPE BUILDER TO IMPROVE AZIM...
- Publication number 20220327262
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pedestal heater for Spatial Multi-Wafer Processing Tool
- Publication number 20220319899
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER ASSEMBLY WITH PURGE GAP CONTROL AND TEMPERATURE UNIFORMITY F...
- Publication number 20220312553
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMALLY UNIFORM DEPOSITION STATION
- Publication number 20220119948
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION PLATE FOR THERMAL DEPOSITION
- Publication number 20210394144
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Pedestal Heater for Spatial Multi-Wafer Processing Tool
- Publication number 20210111058
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Heater With Backside And Integrated Bevel Purge
- Publication number 20210111059
- Publication date Apr 15, 2021
- Applies Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spatial Wafer Processing With Improved Temperature Uniformity
- Publication number 20200392621
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead With Inlet Mixer
- Publication number 20200370180
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Ashutosh Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for cleaning a substrate
- Publication number 20200230782
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Pulkit AGARWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Spatial Wafer Processing With Improved Temperature Uniformity
- Publication number 20200131635
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Station Chamber Lid With Precise Temperature And Flow Control
- Publication number 20200102651
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal Management System
- Publication number 20200075366
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Tejas Ulavi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
GAS DISTRIBUTION PLATE FOR THERMAL DEPOSITION
- Publication number 20200030766
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Methods and Apparatus for Cleaning a Substrate
- Publication number 20160322239
- Publication date Nov 3, 2016
- Applied Materials, Inc.
- Pulkit AGARWAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR IMPROVING GAS FLOW IN A SUBSTRATE PROCESSI...
- Publication number 20150345019
- Publication date Dec 3, 2015
- Applied Materials, Inc.
- XIAOXIONG YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CASCADE DESIGN SHOWERHEAD FOR TRANSIENT UNIFORMITY
- Publication number 20140299681
- Publication date Oct 9, 2014
- DHRITIMAN S. KASHYAP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY
- Publication number 20130341433
- Publication date Dec 26, 2013
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Dhritiman Subha Kashyap

Person

Patents Grantslast 30 patents

Gas mixer

Thermal shield for processing chamber

Gas distribution plate

Heater assembly with purge gap control and temperature uniformity f...

Wafer heater with backside and integrated bevel purge

Pedestal heater for spatial multi-wafer processing tool

Thermally uniform deposition station

Machine learning based smart process recipe builder to improve azim...

Gas distribution plate for thermal deposition

Showerhead with inlet mixer

Spatial wafer processing with improved temperature uniformity

Pedestal heater for spatial multi-wafer processing tool

Gas distribution plate for thermal deposition

Multi-station chamber lid with precise temperature and flow control

Thermal management system

Spatial wafer processing with improved temperature uniformity

Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery

Cascade design showerhead for transient uniformity

Patents Applicationslast 30 patents

CROSS FLOW GAS DELIVERY FOR PARTICLE REDUCTION

SHOWERHEAD DESIGN FOR PLASMA-ENHANCED DEPOSITION

SUBSTRATE DEGAS STATION

SUBSTRATE DEGAS STATION

Showerhead Assembly with Heated Showerhead

GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY

THERMAL SHIELD FOR PROCESSING CHAMBER

Wafer Heater With Backside And Integrated Bevel Purge

MACHINE LEARNING BASED SMART PROCESS RECIPE BUILDER TO IMPROVE AZIM...

Pedestal heater for Spatial Multi-Wafer Processing Tool

HEATER ASSEMBLY WITH PURGE GAP CONTROL AND TEMPERATURE UNIFORMITY F...

THERMALLY UNIFORM DEPOSITION STATION

GAS DISTRIBUTION PLATE FOR THERMAL DEPOSITION

Pedestal Heater for Spatial Multi-Wafer Processing Tool

Wafer Heater With Backside And Integrated Bevel Purge

Spatial Wafer Processing With Improved Temperature Uniformity

Showerhead With Inlet Mixer

Method and Apparatus for cleaning a substrate

Spatial Wafer Processing With Improved Temperature Uniformity

Multi-Station Chamber Lid With Precise Temperature And Flow Control

Thermal Management System

GAS DISTRIBUTION PLATE FOR THERMAL DEPOSITION

Methods and Apparatus for Cleaning a Substrate

METHOD AND APPARATUS FOR IMPROVING GAS FLOW IN A SUBSTRATE PROCESSI...

CASCADE DESIGN SHOWERHEAD FOR TRANSIENT UNIFORMITY

DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY