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Albany, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Selective etching of silicon carbide films
Patent number
7,151,277
Issue date
Dec 19, 2006
The Regents of the University of California
Di Gao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Selective etching of silicon carbide films
Publication number
20050001276
Publication date
Jan 6, 2005
The Regents of the University of California
Di Gao
B81 - MICRO-STRUCTURAL TECHNOLOGY