Diana Shaphirov

Person

Yoqneam Illit, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Optical metrology utilizing short-wave infrared wavelengths
- Patent number 12,111,580
- Issue date Oct 8, 2024
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Imaging overlay targets using moiré elements and rotational symmetr...
- Patent number 12,105,433
- Issue date Oct 1, 2024
- KLA Corporation
- Yoel Feler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Field-to-field corrections using overlay targets
- Patent number 11,467,503
- Issue date Oct 11, 2022
- KLA Corporation
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging overlay targets using Moiré elements and rotational symmetr...
- Patent number 11,256,177
- Issue date Feb 22, 2022
- KLA Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Field-to-field corrections using overlay targets
- Patent number 10,990,022
- Issue date Apr 27, 2021
- KLA Corporation
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...
- Publication number 20250021019
- Publication date Jan 16, 2025
- KLA Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...
- Publication number 20240210841
- Publication date Jun 27, 2024
- KLA Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL METROLOGY UTILIZING SHORT-WAVE INFRARED WAVELENGTHS
- Publication number 20220291143
- Publication date Sep 15, 2022
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...
- Publication number 20220171297
- Publication date Jun 2, 2022
- KLA Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIELD-TO-FIELD CORRECTIONS USING OVERLAY TARGETS
- Publication number 20210200105
- Publication date Jul 1, 2021
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging Overlay Targets Using Moire Elements and Rotational Symmetr...
- Publication number 20210072650
- Publication date Mar 11, 2021
- KLA Corporation
- Yoel Feler
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Field-to-Field Corrections Using Overlay Targets
- Publication number 20200201193
- Publication date Jun 25, 2020
- KLA Corporation
- Enna Leshinsky-Altshuller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Diana Shaphirov

Person

Patents Grantslast 30 patents

Optical metrology utilizing short-wave infrared wavelengths

Imaging overlay targets using moiré elements and rotational symmetr...

Field-to-field corrections using overlay targets

Imaging overlay targets using Moiré elements and rotational symmetr...

Field-to-field corrections using overlay targets

Patents Applicationslast 30 patents

IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...

IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...

OPTICAL METROLOGY UTILIZING SHORT-WAVE INFRARED WAVELENGTHS

IMAGING OVERLAY TARGETS USING MOIRÉ ELEMENTS AND ROTATIONAL SYMMETR...

FIELD-TO-FIELD CORRECTIONS USING OVERLAY TARGETS

Imaging Overlay Targets Using Moire Elements and Rotational Symmetr...

Field-to-Field Corrections Using Overlay Targets