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Diane Czop McCafferty
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Sandy Hook, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus, a dryer and a method of removing liquid fro...
Patent number
9,632,425
Issue date
Apr 25, 2017
ASML Holding N.V.
Martinus Hendrikus Antonius Leenders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for thermally-induced aberration correction in...
Patent number
8,736,807
Issue date
May 27, 2014
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus with immersion fluid re-circulatin...
Patent number
8,629,970
Issue date
Jan 14, 2014
ASML Netherlands B.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Re-flow and buffer system for immersion lithography
Patent number
8,451,422
Issue date
May 28, 2013
ASML Netherlands B.V.
Harry Sewell
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for thermally-induced aberration correction in...
Patent number
7,995,185
Issue date
Aug 9, 2011
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interferometric lithographic projection apparatus
Patent number
7,751,030
Issue date
Jul 6, 2010
ASML Holding N.V.
Louis Markoya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,684,014
Issue date
Mar 23, 2010
ASML Holding B.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS, A DRYER AND A METHOD OF REMOVING LIQUID FRO...
Publication number
20170227856
Publication date
Aug 10, 2017
ASML NETHERLANDS B.V.
Martinus Hendrikus Antonius LEENDERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS AND METHODS FOR THERMALLY-INDUCED ABERRATION CORRECTION IN...
Publication number
20110261335
Publication date
Oct 27, 2011
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING DEVICE, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DE...
Publication number
20100214544
Publication date
Aug 26, 2010
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RE-FLOW AND BUFFER SYSTEM FOR IMMERSION LITHOGRAPHY
Publication number
20090213343
Publication date
Aug 27, 2009
ASML NETHERLANDS B.V.
Harry Sewell
G01 - MEASURING TESTING
Information
Patent Application
IMMERSION LITHOGRAPHIC APPARATUS WITH IMMERSION FLUID RE-CIRCULATIN...
Publication number
20090185149
Publication date
Jul 23, 2009
ASML Holding N.V.
Harry SEWELL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, a dryer and a method of removing liquid fro...
Publication number
20080192214
Publication date
Aug 14, 2008
ASML NETHERLANDS B.V.
Martinus Hendrikus Antonius Leenders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Systems and methods for thermally-induced aberration correction in...
Publication number
20080137044
Publication date
Jun 12, 2008
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080129973
Publication date
Jun 5, 2008
ASML Holding N.V.
Diane McCafferty
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Interferometric lithographic projection apparatus
Publication number
20060170896
Publication date
Aug 3, 2006
ASML Holding, N.V.
Louis J. Markoya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY