Diane Stewart

Person

Ipswich, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam system and methods
- Patent number 10,410,828
- Issue date Sep 10, 2019
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for statistical characterization of nano-part...
- Patent number 8,119,985
- Issue date Feb 21, 2012
- FEI Company
- Diane K. Stewart
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam processing for mask repair
- Patent number 7,727,681
- Issue date Jun 1, 2010
- FEI Company
- Diane K. Stewart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithography mask repair
- Patent number 7,662,524
- Issue date Feb 16, 2010
- FEI Company
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for statistical characterization of nano-part...
- Patent number 7,544,938
- Issue date Jun 9, 2009
- FEI, Company
- Diane K. Stewart
- G01 - MEASURING TESTING
Information Patent Grant
Photolithography mask repair
- Patent number 7,504,182
- Issue date Mar 17, 2009
- FEI Company
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam system
- Patent number 6,979,822
- Issue date Dec 27, 2005
- FEI Company
- Diane K. Stewart
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHODS
- Publication number 20190189392
- Publication date Jun 20, 2019
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM AND METHODS
- Publication number 20160203948
- Publication date Jul 14, 2016
- Carl Zeiss Microscopy, LLC
- Chuong Huynh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Apparatus for Statistical Characterization of Nano-Part...
- Publication number 20090326866
- Publication date Dec 31, 2009
- FEI Company
- Diane K. Stewart
- G01 - MEASURING TESTING
Information Patent Application
PHOTOLITHOGRAPHY MASK REPAIR
- Publication number 20090111036
- Publication date Apr 30, 2009
- FEI Company
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20050279934
- Publication date Dec 22, 2005
- FEI Company
- Diane K. Stewart
- G01 - MEASURING TESTING
Information Patent Application
Electron beam processing for mask repair
- Publication number 20040226814
- Publication date Nov 18, 2004
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photolithography mask repair
- Publication number 20040151991
- Publication date Aug 5, 2004
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Diane Stewart

Person

Patents Grantslast 30 patents

Charged particle beam system and methods

Methods and apparatus for statistical characterization of nano-part...

Electron beam processing for mask repair

Photolithography mask repair

Methods and apparatus for statistical characterization of nano-part...

Photolithography mask repair

Charged particle beam system

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM SYSTEM AND METHODS

CHARGED PARTICLE BEAM SYSTEM AND METHODS

Methods and Apparatus for Statistical Characterization of Nano-Part...

PHOTOLITHOGRAPHY MASK REPAIR

CHARGED PARTICLE BEAM SYSTEM

Electron beam processing for mask repair

Photolithography mask repair