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Dianwen ZHU
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San Jose, CA, US
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last 30 patents
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Patent Grant
Methods of tuning process models
Patent number
11,614,690
Issue date
Mar 28, 2023
ASML Netherlands B.V.
Mu Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION
Publication number
20250021015
Publication date
Jan 16, 2025
ASML NETHERLANDS B.V.
Jin CHENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF TUNING PROCESS MODELS
Publication number
20190369498
Publication date
Dec 5, 2019
ASML NETHERLANDS B.V.
Mu FENG
G05 - CONTROLLING REGULATING