Dieter Albert

Follow

Person

Karlsruhe, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer treating device and sealing ring for a wafer treating device
- Patent number 10,295,063
- Issue date May 21, 2019
- Suss MicroTec Lithography GmbH
- Dieter Albert
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Wafer Treating Device and Sealing Ring for a Wafer Treating Device
- Publication number 20160300751
- Publication date Oct 13, 2016
- SUSS MICROTEC LITHOGRAPHY GMBH
- Dieter Albert
- H01 - BASIC ELECTRIC ELEMENTS