Dieter Bader

Person

Goeggingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Sealing device, component and lithography apparatus
- Patent number 11,740,562
- Issue date Aug 29, 2023
- Carl Zeiss SMT GmbH
- Dieter Bader
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,091,936
- Issue date Jul 28, 2015
- Carl Zeiss SMT GmbH
- Dieter Bader
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective, projection exposure apparatus and reflective...
- Patent number 8,064,040
- Issue date Nov 22, 2011
- Carl Zeiss SMT GmbH
- Aurelian Dodoc
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Refractive optical imaging system, in particular projection objecti...
- Patent number 7,511,890
- Issue date Mar 31, 2009
- Carl Zeiss SMT AG
- Wilhelm Ulrich
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT AND PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR...
- Publication number 20250130504
- Publication date Apr 24, 2025
- Carl Zeiss SMT GMBH
- Dieter Bader
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
- Publication number 20240085800
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR PRODUCING AN ADHESIVE BOND BETWEEN A FIRST CO...
- Publication number 20220118715
- Publication date Apr 21, 2022
- Carl Zeiss SMT GMBH
- Dieter Bader
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SEALING DEVICE, COMPONENT AND LITHOGRAPHY APPARATUS
- Publication number 20220019150
- Publication date Jan 20, 2022
- Carl Zeiss SMT GMBH
- Dieter Bader
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20120002184
- Publication date Jan 5, 2012
- Carl Zeiss SMT GMBH
- Dieter Bader
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COLLECTOR FOR ILLUMINATION SYSTEMS WITH A WAVELENGTH LESS THAN OR E...
- Publication number 20080225387
- Publication date Sep 18, 2008
- Carl Zeiss SMT AG
- Joachim Hainz
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL SYSTEM WITH AT LEAST A SEMICONDUCTOR LIGHT SOURCE AND A MET...
- Publication number 20080212045
- Publication date Sep 4, 2008
- Carl Zeiss SMT AG
- Dieter BADER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection Objective, Projection Exposure Apparatus and Reflective...
- Publication number 20080198353
- Publication date Aug 21, 2008
- Carl Zeiss SMT AG
- Aurelian Dodoc
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination System for a Microlithographic Projection Exposure App...
- Publication number 20080111983
- Publication date May 15, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Refractive optical imaging system, in particular projection objecti...
- Publication number 20060198028
- Publication date Sep 7, 2006
- Carl Zeiss SMT AG
- Wilhelm Ulrich
- G02 - OPTICS
Information Patent Application
Optical apparatus for illuminating an object
- Publication number 20050226000
- Publication date Oct 13, 2005
- Carl Zeiss SMT AG
- Dieter Bader
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for producing an optical element from a quartz substrate
- Publication number 20050117203
- Publication date Jun 2, 2005
- Carl Zeiss SMT AG
- Nils Dieckmann
- G02 - OPTICS
Information Patent Application
Method for producing an optical element from a quartz substrate
- Publication number 20040021843
- Publication date Feb 5, 2004
- Carl Zeiss SMT AG
- Nils Dieckmann
- G02 - OPTICS

Dieter Bader

Person

Patents Grantslast 30 patents

Sealing device, component and lithography apparatus

Illumination system of a microlithographic projection exposure appa...

Projection objective, projection exposure apparatus and reflective...

Refractive optical imaging system, in particular projection objecti...

Patents Applicationslast 30 patents

OPTICAL ELEMENT AND PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR...

PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...

METHOD AND DEVICE FOR PRODUCING AN ADHESIVE BOND BETWEEN A FIRST CO...

SEALING DEVICE, COMPONENT AND LITHOGRAPHY APPARATUS

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

COLLECTOR FOR ILLUMINATION SYSTEMS WITH A WAVELENGTH LESS THAN OR E...

OPTICAL SYSTEM WITH AT LEAST A SEMICONDUCTOR LIGHT SOURCE AND A MET...

Projection Objective, Projection Exposure Apparatus and Reflective...

Illumination System for a Microlithographic Projection Exposure App...

Refractive optical imaging system, in particular projection objecti...

Optical apparatus for illuminating an object

Method for producing an optical element from a quartz substrate

Method for producing an optical element from a quartz substrate