Dieter Frank

Person

Villach, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 9,548,223
- Issue date Jan 17, 2017
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 9,355,836
- Issue date May 31, 2016
- Lam Research AG
- Dieter Frank
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Device for holding wafer shaped articles
- Patent number 9,130,002
- Issue date Sep 8, 2015
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for wet treatment of disc-like articles
- Patent number 8,821,681
- Issue date Sep 2, 2014
- Lam Research AG
- Michael Puggl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and process for wet treating a peripheral area of a wafer-sh...
- Patent number 8,801,865
- Issue date Aug 12, 2014
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for treating a semiconductor wafer
- Patent number 8,668,777
- Issue date Mar 11, 2014
- Lam Research AG
- Harald Okorn-Schmidt
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Device and process for liquid treatment of a wafer shaped article
- Patent number 8,596,623
- Issue date Dec 3, 2013
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20150187561
- Publication date Jul 2, 2015
- LAM RESEARCH AG
- Dieter FRANK
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130319472
- Publication date Dec 5, 2013
- LAM RESEARCH AG
- Dieter FRANK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20130160260
- Publication date Jun 27, 2013
- LAM RESEARCH AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR TREATING A SEMICONDUCTOR WAFER
- Publication number 20120160276
- Publication date Jun 28, 2012
- LAM RESEARCH AG
- Harald OKORN-SCHMIDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
- Publication number 20110272874
- Publication date Nov 10, 2011
- LAM RESEARCH AG
- Dieter FRANK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND PROCESS FOR LIQUID TREATMENT OF A WAFER SHAPED ARTICLE
- Publication number 20110151675
- Publication date Jun 23, 2011
- LAM RESEARCH AG
- Dieter FRANK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND PROCESS FOR WET TREATING A PERIPHERAL AREA OF A WAFER-SH...
- Publication number 20100288312
- Publication date Nov 18, 2010
- LAM RESEARCH AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR WET TREATMENT OF DISC-LIKE ARTICLES
- Publication number 20100200163
- Publication date Aug 12, 2010
- LAM RESEARCH AG
- Michael Puggi
- H01 - BASIC ELECTRIC ELEMENTS

Dieter Frank

Person

Patents Grantslast 30 patents

Apparatus for treating surfaces of wafer-shaped articles

Method and apparatus for liquid treatment of wafer shaped articles

Device for holding wafer shaped articles

Apparatus and method for wet treatment of disc-like articles

Device and process for wet treating a peripheral area of a wafer-sh...

Process for treating a semiconductor wafer

Device and process for liquid treatment of a wafer shaped article

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

PROCESS FOR TREATING A SEMICONDUCTOR WAFER

DEVICE FOR HOLDING WAFER SHAPED ARTICLES

DEVICE AND PROCESS FOR LIQUID TREATMENT OF A WAFER SHAPED ARTICLE

DEVICE AND PROCESS FOR WET TREATING A PERIPHERAL AREA OF A WAFER-SH...

APPARATUS AND METHOD FOR WET TREATMENT OF DISC-LIKE ARTICLES