Dieter Hezler

Person

Lonsee-Halzhausen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Rapid thermal processing system with cooling system
- Patent number 12,068,177
- Issue date Aug 20, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,046,489
- Issue date Jul 23, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
- Patent number 11,955,315
- Issue date Apr 9, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
- Patent number 11,837,447
- Issue date Dec 5, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid leakage detection for a millisecond anneal system
- Patent number 10,359,334
- Issue date Jul 23, 2019
- Mattson Technology, Inc.
- Manuel Mueller
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
- Publication number 20240212981
- Publication date Jun 27, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240055242
- Publication date Feb 15, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arc Lamp With Forming Gas For Thermal Processing Systems
- Publication number 20230352294
- Publication date Nov 2, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Support For A Thermal Processing System
- Publication number 20220205478
- Publication date Jun 30, 2022
- Mattson Technology, Inc.
- Manuel Sohn
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Workpiece Processing Apparatus with Gas Showerhead Assembly
- Publication number 20220195601
- Publication date Jun 23, 2022
- Mattson Technology, Inc.
- Michael Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
- Publication number 20220189747
- Publication date Jun 16, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20220187021
- Publication date Jun 16, 2022
- Mattson Technology, Inc.
- Manuel Sohn
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
- Publication number 20220189737
- Publication date Jun 16, 2022
- Mattson Technology, Inc.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rapid Thermal Processing System With Cooling System
- Publication number 20220059363
- Publication date Feb 24, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rapid Thermal Processing System With Cooling System
- Publication number 20220059371
- Publication date Feb 24, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluid Leakage Detection for a Millisecond Anneal System
- Publication number 20170191897
- Publication date Jul 6, 2017
- Mattson Technology, Inc.
- Manuel Mueller
- G01 - MEASURING TESTING

Dieter Hezler

Person

Patents Grantslast 30 patents

Rapid thermal processing system with cooling system

Workpiece processing apparatus with thermal processing systems

Workpiece processing apparatus with plasma and thermal processing s...

Workpiece processing apparatus with plasma and thermal processing s...

Fluid leakage detection for a millisecond anneal system

Patents Applicationslast 30 patents

Workpiece Processing Apparatus with Plasma and Thermal Processing S...

Workpiece Processing Apparatus with Thermal Processing Systems

Arc Lamp With Forming Gas For Thermal Processing Systems

Workpiece Support For A Thermal Processing System

Workpiece Processing Apparatus with Gas Showerhead Assembly

Workpiece Processing Apparatus with Plasma and Thermal Processing S...

Workpiece Processing Apparatus with Thermal Processing Systems

Workpiece Processing Apparatus with Plasma and Thermal Processing S...

Rapid Thermal Processing System With Cooling System

Rapid Thermal Processing System With Cooling System

Fluid Leakage Detection for a Millisecond Anneal System