Dieter Mueller

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process-induced displacement characterization during semiconductor...
- Patent number 11,682,570
- Issue date Jun 20, 2023
- KLA Corporation
- Pradeep Vukkadala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-spot analysis system with multiple optical probes
- Patent number 11,441,893
- Issue date Sep 13, 2022
- KLA Corporation
- Prasanna Dighe
- G02 - OPTICS
Information Patent Grant
Process-induced displacement characterization during semiconductor...
- Patent number 11,164,768
- Issue date Nov 2, 2021
- KLA Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Grant
Removable opaque coating for accurate optical topography measuremen...
- Patent number 11,049,720
- Issue date Jun 29, 2021
- KLA Corporation
- Dieter Mueller
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Grazing and normal incidence interferometer having common reference...
- Patent number 9,273,952
- Issue date Mar 1, 2016
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring shape or thickness information o...
- Patent number 8,068,234
- Issue date Nov 29, 2011
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Copper CMP flatness monitor using grazing incidence interferometry
- Patent number 7,505,144
- Issue date Mar 17, 2009
- KLA-Tencor Technologies Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Runout characterization
- Patent number 7,433,047
- Issue date Oct 7, 2008
- KLA-Tencor Corporation
- David R. Peale
- G01 - MEASURING TESTING
Information Patent Grant
Reduced coherence symmetric grazing incidence differential interfer...
- Patent number 7,173,715
- Issue date Feb 6, 2007
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Reduced coherence symmetric grazing incidence differential interfer...
- Patent number 7,057,741
- Issue date Jun 6, 2006
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Copper CMP flatness monitor using grazing incidence interferometry
- Patent number 6,806,966
- Issue date Oct 19, 2004
- KLA-Tencor Techologies Corporation
- Dieter Mueller
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Process-Induced Displacement Characterization During Semiconductor...
- Publication number 20220005714
- Publication date Jan 6, 2022
- KLA Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Application
REMOVABLE OPAQUE COATING FOR ACCURATE OPTICAL TOPOGRAPHY MEASUREMEN...
- Publication number 20200126786
- Publication date Apr 23, 2020
- KLA Corporation
- Dieter Mueller
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multi-Spot Analysis System with Multiple Optical Probes
- Publication number 20190331592
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Prasanna Dighe
- G01 - MEASURING TESTING
Information Patent Application
Process-Induced Displacement Characterization During Semiconductor...
- Publication number 20190333794
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Application
Grazing and Normal Incidence Interferometer Having Common Reference...
- Publication number 20140333937
- Publication date Nov 13, 2014
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Determining One or More Characteristics of...
- Publication number 20120281275
- Publication date Nov 8, 2012
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF...
- Publication number 20100235114
- Publication date Sep 16, 2010
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...
- Publication number 20100208272
- Publication date Aug 19, 2010
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Reduced coherence symmetric grazing incidence differential interfer...
- Publication number 20080278732
- Publication date Nov 13, 2008
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
Reduced coherence symmetric grazing incidence differential interfer...
- Publication number 20060126076
- Publication date Jun 15, 2006
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
Copper CMP flatness monitor using grazing incidence interferometry
- Publication number 20050078320
- Publication date Apr 14, 2005
- Dieter Mueller
- G01 - MEASURING TESTING

Dieter Mueller

Person

Patents Grantslast 30 patents

Process-induced displacement characterization during semiconductor...

Multi-spot analysis system with multiple optical probes

Process-induced displacement characterization during semiconductor...

Removable opaque coating for accurate optical topography measuremen...

Grazing and normal incidence interferometer having common reference...

Method and apparatus for measuring shape or thickness information o...

Copper CMP flatness monitor using grazing incidence interferometry

Runout characterization

Reduced coherence symmetric grazing incidence differential interfer...

Reduced coherence symmetric grazing incidence differential interfer...

Copper CMP flatness monitor using grazing incidence interferometry

Patents Applicationslast 30 patents

Process-Induced Displacement Characterization During Semiconductor...

REMOVABLE OPAQUE COATING FOR ACCURATE OPTICAL TOPOGRAPHY MEASUREMEN...

Multi-Spot Analysis System with Multiple Optical Probes

Process-Induced Displacement Characterization During Semiconductor...

Grazing and Normal Incidence Interferometer Having Common Reference...

Systems and Methods for Determining One or More Characteristics of...

SYSTEMS AND METHODS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF...

METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...

Reduced coherence symmetric grazing incidence differential interfer...

Reduced coherence symmetric grazing incidence differential interfer...

Copper CMP flatness monitor using grazing incidence interferometry