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Dieter Van Den Heuvel
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Westerloo, BE
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Patents Grants
last 30 patents
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Patent Grant
Method for hotspot detection and ranking of a lithographic mask
Patent number
9,874,821
Issue date
Jan 23, 2018
Imec VZW
Sandip Halder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method for Hotspot Detection and Ranking of a Lithographic Mask
Publication number
20160313647
Publication date
Oct 27, 2016
IMEC vzw
Sandip Halder
G01 - MEASURING TESTING