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Dieter Zernickel
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Amstetten, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Measurement object, method for the production thereof and device fo...
Patent number
10,024,719
Issue date
Jul 17, 2018
Centrotherm Photovoltaics AG
Dieter Zernickel
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Localized heating and cooling of substrates
Patent number
7,037,797
Issue date
May 2, 2006
Mattson Technology, Inc.
Sohaila Shooshtarian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus device for the heat treatment of substrates
Patent number
6,752,625
Issue date
Jun 22, 2004
Steag RTP Systems GmbH
Helmut Aschner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas driven rotating susceptor for rapid thermal processing (RTP) sy...
Patent number
6,449,428
Issue date
Sep 10, 2002
Mattson Technology Corp.
Helmut Aschner
C30 - CRYSTAL GROWTH
Information
Patent Grant
Rapid thermal processing (RTP) system with gas driven rotating subs...
Patent number
6,005,226
Issue date
Dec 21, 1999
Steag-RTP Systems
Helmut Aschner
C30 - CRYSTAL GROWTH
Information
Patent Grant
Inflatable elastomeric element for rapid thermal processing (RTP) s...
Patent number
5,870,526
Issue date
Feb 9, 1999
Steag-Ast
Helmut Aschner
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
MEASUREMENT OBJECT, METHOD FOR THE PRODUCTION THEREOF AND DEVICE FO...
Publication number
20160131532
Publication date
May 12, 2016
Centrotherm Photovoltaics AG
Dieter Zernickel
G01 - MEASURING TESTING
Information
Patent Application
Retainer, Method For Producing Same And Use Thereof
Publication number
20160111319
Publication date
Apr 21, 2016
Centrotherm Photovoltaics AG
HANS-PETER VOELK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM DEVICE FOR CONTINUOUS PROCESSING OF SUBSTRATES
Publication number
20090133628
Publication date
May 28, 2009
Centrotherm Photovoltaics AG
Roland DAHL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SY...
Publication number
20010002948
Publication date
Jun 7, 2001
Rodney T. Hodgson
HELMUT ASCHNER
C30 - CRYSTAL GROWTH