Diethard Kloepfel

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Kleinhelmsdorf, DE

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Patents Grantslast 30 patents

Information Patent Grant
Arrangement for the continuous generation of liquid tin as emitter...
- Patent number 8,154,000
- Issue date Apr 10, 2012
- XTREME technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for generating extreme ultraviolet radiation from a pla...
- Patent number 7,599,470
- Issue date Oct 6, 2009
- Xtreme technologies GmbH
- Diethard Kloepfel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for providing a reproducible target flow for the energy...
- Patent number 7,372,057
- Issue date May 13, 2008
- Xtreme technologies GmbH
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement and method for metering target material for the generat...
- Patent number 7,368,742
- Issue date May 6, 2008
- Xtreme technologies GmbH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ARRANGEMENT FOR THE CONTINUOUS GENERATION OF LIQUID TIN AS EMITTER...
- Publication number 20100282987
- Publication date Nov 11, 2010
- XTREME TECHNOLOGIES GMBH
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION FROM A PLA...
- Publication number 20080067456
- Publication date Mar 20, 2008
- XTREME technologies GmbH;
- DIETHARD KLOEPFEL
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement for providing a reproducible target flow for the energy...
- Publication number 20060043319
- Publication date Mar 2, 2006
- XTREME technologies GmbH;
- Kai Gaebel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement and method for metering target material for the generat...
- Publication number 20060017026
- Publication date Jan 26, 2006
- XTREME technologies GmbH;
- Guido Hergenhan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR