Dietmar Duerr

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Dettingen, DE

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Patents Applicationslast 30 patents

Information Patent Application
BIPOD, OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS
- Publication number 20250208523
- Publication date Jun 26, 2025
- Carl Zeiss SMT GMBH
- Sonia Anaelle Bissie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
- Publication number 20240085800
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G02 - OPTICS
Information Patent Application
METHOD AND SWAPPING TOOL
- Publication number 20230400772
- Publication date Dec 14, 2023
- Carl Zeiss SMT GMBH
- Eugen Doetzel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MODULE FOR A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOG...
- Publication number 20210255554
- Publication date Aug 19, 2021
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY