Dietmar HAMMER

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for removing liquid from a surface of a disc-like...
- Patent number 10,410,888
- Issue date Sep 10, 2019
- Lam Research AG
- Christoph Semmelrock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for liquid treatment of wafer shaped articles
- Patent number 9,972,514
- Issue date May 15, 2018
- LAM RESEARCH AG
- Dietmar Hammer
- B08 - CLEANING
Information Patent Grant
Reinforced pin for being used in a pin chuck, and a pin chuck using...
- Patent number 8,608,146
- Issue date Dec 17, 2013
- Lam Research AG
- Michael Brugger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20170256433
- Publication date Sep 7, 2017
- LAM RESEARCH AG
- Dietmar HAMMER
- B08 - CLEANING
Information Patent Application
DEVICE AND METHOD FOR REMOVING LIQUID FROM A SURFACE OF A DISC-LIKE...
- Publication number 20150243533
- Publication date Aug 27, 2015
- LAM RESEARCH AG
- Christoph SEMMELROCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REINFORCED PIN FOR BEING USED IN A PIN CHUCK, AND A PIN CHUCK USING...
- Publication number 20110148022
- Publication date Jun 23, 2011
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS