Dietmar Neugebauer

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical system, in particular in a microlithographic projection exp...
- Patent number 8,654,345
- Issue date Feb 18, 2014
- Carl Zeiss SMT GmbH
- Albrecht Hof
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a shape of an optical surface based on computat...
- Patent number 8,593,642
- Issue date Nov 26, 2013
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for measuring lithography masks
- Patent number 8,253,947
- Issue date Aug 28, 2012
- Carl Zeiss SMS GmbH
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...
- Publication number 20140078513
- Publication date Mar 20, 2014
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G02 - OPTICS
Information Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...
- Publication number 20120229814
- Publication date Sep 13, 2012
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXP...
- Publication number 20120140241
- Publication date Jun 7, 2012
- Carl Zeiss SMT GMBH
- Albrecht Hof
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
- Publication number 20110205549
- Publication date Aug 25, 2011
- Carl Zeiss SMS GmbH
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY