Dietmar Schnier

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Garbsen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for operating a machine for microlithography
- Patent number 11,480,883
- Issue date Oct 25, 2022
- Carl Zeiss SMT GmbH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Irradiation module for a measuring apparatus
- Patent number 9,678,436
- Issue date Jun 13, 2017
- Carl Zeiss SMT GmbH
- Dietmar Schnier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature sensor and method for measuring a temperature change
- Patent number 9,255,876
- Issue date Feb 9, 2016
- Carl Zeiss SMS GmbH
- Dietmar Schnier
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPERATING A MACHINE FOR MICROLITHOGRAPHY
- Publication number 20190278187
- Publication date Sep 12, 2019
- Carl Zeiss SMT GMBH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IRRADIATION MODULE FOR A MEASURING APPARATUS
- Publication number 20130293962
- Publication date Nov 7, 2013
- CARL ZEISS SMS GMBH
- Dietmar Schnier
- G02 - OPTICS
Information Patent Application
TEMPERATURE SENSOR AND METHOD FOR MEASURING A TEMPERATURE CHANGE
- Publication number 20130258342
- Publication date Oct 3, 2013
- Dietmar Schnier
- G01 - MEASURING TESTING