Dietmar Wagner

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Sindelfingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Reflective phaseshift lithography system
- Patent number 6,122,037
- Issue date Sep 19, 2000
- International Business Machines Corporation
- Dietmar Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining line centers in a microminiatu...
- Patent number 5,063,300
- Issue date Nov 5, 1991
- International Business Machines Corporation
- Michael Kallmeyer
- G01 - MEASURING TESTING
Information Patent Grant
Method for surface testing
- Patent number 4,681,442
- Issue date Jul 21, 1987
- International Business Machines Corporation
- Dietmar Wagner
- G02 - OPTICS
Information Patent Grant
Apparatus for dark field illumination
- Patent number 4,291,938
- Issue date Sep 29, 1981
- International Business Machines Corporation
- Dietmar Wagner
- G02 - OPTICS