Dilek Kaya

Follow

Person

Tilburg, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination beam measurement
- Patent number 7,436,502
- Issue date Oct 14, 2008
- ASML Netherlands B.V.
- Johannes Jacobus Matheus Baselmans
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Illumination beam measurement
- Publication number 20070070329
- Publication date Mar 29, 2007
- ASML NETHERLANDS B.V.
- Johannes Jacobus Matheus Baselmans
- G01 - MEASURING TESTING