Dimitra Sarri

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Level sensor, lithographic apparatus, and substrate surface positio...
- Patent number 8,675,210
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LEVEL SENSOR, LITHOGRAPHIC APPARATUS, AND SUBSTRATE SURFACE POSITIO...
- Publication number 20130077079
- Publication date Mar 28, 2013
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100231881
- Publication date Sep 16, 2010
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING