Membership
Tour
Register
Log in
DIMITRIS LYMBEROPOULOS
Follow
Person
San Jose, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus employing integrated metrology for improved di...
Patent number
7,265,382
Issue date
Sep 4, 2007
Applied Materials, Inc.
Dimitris Lymberopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for event detection in plasma processes
Patent number
7,006,205
Issue date
Feb 28, 2006
Applied Materials Inc.
Ashish Agarwal
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for monitoring a process by employing principa...
Patent number
6,896,763
Issue date
May 24, 2005
Lalitha Balasubramhanya
G01 - MEASURING TESTING
Information
Patent Grant
Fault detection and virtual sensor methods for tool fault monitoring
Patent number
6,895,293
Issue date
May 17, 2005
Applied Materials, Inc.
Terry Reiss
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Run-to-run control over semiconductor processing tool based upon mi...
Patent number
6,625,513
Issue date
Sep 23, 2003
Applied Materials, Inc.
Dimitris Lymberopoulos
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Film thickness control using spectral interferometry
Patent number
6,589,869
Issue date
Jul 8, 2003
Applied Materials, Inc.
Moshe Sarfaty
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for monitoring a process by employing principa...
Patent number
6,521,080
Issue date
Feb 18, 2003
Applied Materials Inc.
Lalitha Balasubramhanya
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for monitoring the process state of a semicond...
Patent number
6,455,437
Issue date
Sep 24, 2002
Applied Materials Inc.
Jed Davidow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film thickness control using spectral interferometry
Patent number
6,413,867
Issue date
Jul 2, 2002
Applied Materials, Inc.
Moshe Sarfaty
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for monitoring a process by employing principa...
Patent number
6,368,975
Issue date
Apr 9, 2002
Applied Materials, Inc.
Lalitha Balasubramhanya
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for improving processing and reducing charge d...
Patent number
6,247,425
Issue date
Jun 19, 2001
Applied Materials, Inc.
Dimitris Lymberopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for improving processing and reducing charge d...
Patent number
6,085,688
Issue date
Jul 11, 2000
Applied Materials, Inc.
Dimitris Lymberopoulos
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SELF-AWARE SEMICONDUCTOR EQUIPMENT
Publication number
20090112520
Publication date
Apr 30, 2009
Applied Materials, Inc.
DIMITRIS LYMBEROPOULOS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Integrated equipment set for forming a low K dielectric interconnec...
Publication number
20060246683
Publication date
Nov 2, 2006
APPLIED MATERIALS, INC.
Judon Tony Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus employing integrated metrology for improved di...
Publication number
20040092047
Publication date
May 13, 2004
Applied Materials,Inc
Dimitris Lymberopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated equipment set for forming a low K dielectric interconnec...
Publication number
20040007325
Publication date
Jan 15, 2004
APPLIED MATERIALS, INC.
Judon Tony Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for event detection in plasma processes
Publication number
20030223055
Publication date
Dec 4, 2003
APPLIED MATERIALS, INC.
Ashish Agarwal
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for monitoring a process by employing principa...
Publication number
20030136511
Publication date
Jul 24, 2003
Lalitha Balasubramhanya
G05 - CONTROLLING REGULATING
Information
Patent Application
Film thickness control using spectral interferometry
Publication number
20020119660
Publication date
Aug 29, 2002
Applied Materials, Inc.
Moshe Sarfaty
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for monitoring a process by employing principa...
Publication number
20020055259
Publication date
May 9, 2002
Lalitha Balasubramhanya
G01 - MEASURING TESTING
Information
Patent Application
Fault detection and virtual sensor methods for tool fault monitoring
Publication number
20020055801
Publication date
May 9, 2002
APPLIED MATERIALS, INC.
Terry Reiss
G05 - CONTROLLING REGULATING