Dimitry Lubomirsky

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for improving dielectric film quality for void fr...
- Patent number 7,541,297
- Issue date Jun 2, 2009
- Applied Materials, Inc.
- Abhijit Basu Mallick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL CONTROL FEATURES IN WAFER PROCESS EQUIPMENT
- Publication number 20160005572
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR IMPROVING DIELECTRIC FILM QUALITY FOR VOID FR...
- Publication number 20090104789
- Publication date Apr 23, 2009
- Applied Materials, Inc.
- Abhijit Basu Mallick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...