Dimitry Sanko

Person

Vallejo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Estimating in-die overlay with tool induced shift correction
- Patent number 12,181,271
- Issue date Dec 31, 2024
- KLA Corporation
- Min-Yeong Moon
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for determining target feature focus in image-bas...
- Patent number 11,921,825
- Issue date Mar 5, 2024
- KLA Corporation
- Etay Lavert
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Self-calibrating overlay metrology
- Patent number 11,880,142
- Issue date Jan 23, 2024
- KLA Corporation
- Stilian Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Self-calibrated overlay metrology using a skew training sample
- Patent number 11,604,063
- Issue date Mar 14, 2023
- KLA Corporation
- Stilian Pandev
- G01 - MEASURING TESTING
Information Patent Grant
Self-calibrating overlay metrology
- Patent number 11,604,420
- Issue date Mar 14, 2023
- KLA Corporation
- Stilian Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for determining target feature focus in image-bas...
- Patent number 11,556,738
- Issue date Jan 17, 2023
- KLA Corporation
- Etay Lavert
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL AND X-RAY METROLOGY METHODS FOR PATTERNED SEMICONDUCTOR STR...
- Publication number 20250146961
- Publication date May 8, 2025
- KLA Corporation
- Daniel James Haxton
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING TARGET FEATURE FOCUS IN IMAGE-BAS...
- Publication number 20240020353
- Publication date Jan 18, 2024
- KLA Corporation
- Etay Lavert
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ESTIMATING IN-DIE OVERLAY WITH TOOL INDUCED SHIFT CORRECTION
- Publication number 20230258446
- Publication date Aug 17, 2023
- KLA Corporation
- Min-Yeong MOON
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SELF-CALIBRATING OVERLAY METROLOGY
- Publication number 20230221656
- Publication date Jul 13, 2023
- KLA Corporation
- Stilian Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SELF-CALIBRATED OVERLAY METROLOGY USING A SKEW TRAINING SAMPLE
- Publication number 20220412734
- Publication date Dec 29, 2022
- Stilian Pandev
- G01 - MEASURING TESTING
Information Patent Application
SELF-CALIBRATING OVERLAY METROLOGY
- Publication number 20220357673
- Publication date Nov 10, 2022
- Stilian Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AMD METHOD FOR DETERMINING TARGET FEATURE FOCUS IN IMAGE-BAS...
- Publication number 20220108128
- Publication date Apr 7, 2022
- KLA Corporation
- Etay Lavert
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Process-Sensitive Metrology Systems and Methods
- Publication number 20170045826
- Publication date Feb 16, 2017
- KLA-Tencor Corporation
- Myungjun Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Dimitry Sanko

Person

Patents Grantslast 30 patents

Estimating in-die overlay with tool induced shift correction

System and method for determining target feature focus in image-bas...

Self-calibrating overlay metrology

Self-calibrated overlay metrology using a skew training sample

Self-calibrating overlay metrology

System and method for determining target feature focus in image-bas...

Patents Applicationslast 30 patents

OPTICAL AND X-RAY METROLOGY METHODS FOR PATTERNED SEMICONDUCTOR STR...

SYSTEM AND METHOD FOR DETERMINING TARGET FEATURE FOCUS IN IMAGE-BAS...

ESTIMATING IN-DIE OVERLAY WITH TOOL INDUCED SHIFT CORRECTION

SELF-CALIBRATING OVERLAY METROLOGY

SELF-CALIBRATED OVERLAY METROLOGY USING A SKEW TRAINING SAMPLE

SELF-CALIBRATING OVERLAY METROLOGY

SYSTEM AMD METHOD FOR DETERMINING TARGET FEATURE FOCUS IN IMAGE-BAS...

Process-Sensitive Metrology Systems and Methods