Dinesh N. Khanna

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Naperville, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Polishing composition for a tungsten-containing substrate
- Patent number 7,582,127
- Issue date Sep 1, 2009
- Cabot Microelectronics Corporation
- Robert Vacassy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunable selectivity slurries in CMP applications
- Patent number 7,294,576
- Issue date Nov 13, 2007
- Cabot Microelectronics Corporation
- Zhan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of polishing a tungsten-containing substrate
- Patent number 7,247,567
- Issue date Jul 24, 2007
- Cabot Microelectronics Corporation
- Robert Vacassy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of polishing a tungsten-containing substrate
- Publication number 20070266641
- Publication date Nov 22, 2007
- Cabot Microelectronics Corporation
- Robert Vacassy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF POLISHING A TUNGSTEN-CONTAINING SUBSTRATE
- Publication number 20070214728
- Publication date Sep 20, 2007
- Cabot Microelectronics Corporation
- Robert Vacassy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of polishing a tungsten-containing substrate
- Publication number 20050282391
- Publication date Dec 22, 2005
- Cabot Microelectronics Corporation
- Robert Vacassy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...