Dinesh S. Kalakkad

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for controlled-angle wafer positioning
- Patent number 7,686,927
- Issue date Mar 30, 2010
- Novellus Systems, Inc.
- Jonathan D. Reid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlled-angle wafer positioning
- Patent number 7,097,410
- Issue date Aug 29, 2006
- Novellus Systems, Inc.
- Jonathan D. Reid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamshell apparatus with crystal shielding and in-situ rinse-dry
- Patent number 7,033,465
- Issue date Apr 25, 2006
- Novellus Systems, Inc.
- Evan E. Patton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamshell apparatus with dynamic uniformity control
- Patent number 6,755,946
- Issue date Jun 29, 2004
- Novellus Systems, Inc.
- Evan E. Patton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlled-angle wafer immersion
- Patent number 6,551,487
- Issue date Apr 22, 2003
- Novellus Systems, Inc.
- Jonathan D. Reid
- H01 - BASIC ELECTRIC ELEMENTS