Ding-I LIU

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor devices and semiconductor dev...
- Patent number 12,020,947
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hui-An Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using high density plasma chemical vapor deposition chamber
- Patent number 12,020,905
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Ching Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous layers for reducing copper diffusion and method forming same
- Patent number 11,967,522
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having a multi-layer diffusion barrier and met...
- Patent number 11,742,393
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density plasma chemical vapor deposition chamber and method of...
- Patent number 11,342,164
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Ching Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices including formation o...
- Patent number 11,322,397
- Issue date May 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiao-Min Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amorphous layers for reducing copper diffusion and method forming same
- Patent number 11,315,829
- Issue date Apr 26, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having multi-layer diffusion barrier and metho...
- Patent number 11,264,467
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron migration control in interconnect structures
- Patent number 11,264,273
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment module with enhanced protection from airborne contaminant...
- Patent number 11,194,259
- Issue date Dec 7, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Chiang Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor devices and semiconductor dev...
- Patent number 11,069,534
- Issue date Jul 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hui-An Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum-containing layers and methods of forming the same
- Patent number 10,978,337
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jyh-nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling an adjustable nozzle and method of making a s...
- Patent number 10,910,199
- Issue date Feb 2, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Ching Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling plasma in semiconductor fabrication
- Patent number 10,867,787
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Tsung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus and method of forming coating film
- Patent number 10,864,530
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Lan-Hai Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a shallow trench isolation structure an...
- Patent number 10,867,838
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Li Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a multi-layer diffusion barrier
- Patent number 10,749,004
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal chemical vapor deposition system and operating method thereof
- Patent number 10,724,140
- Issue date Jul 28, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Chan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition device structure
- Patent number 10,626,499
- Issue date Apr 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Chan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead, semicondcutor processing apparatus having the same and...
- Patent number 10,533,252
- Issue date Jan 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Chiang Chiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection system for a multilayer film and method thereof using dua...
- Patent number 10,429,318
- Issue date Oct 1, 2019
- Industrial Technology Research Institute
- Ding-Kun Liu
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for controlling plasma in semiconductor fabrication
- Patent number 10,395,918
- Issue date Aug 27, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Tsung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal chemical vapor deposition system and operating method thereof
- Patent number 10,161,041
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Chan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor structure with protection layer
- Patent number 10,164,063
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Wei Chiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a shallow trench isolation structure an...
- Patent number 9,953,861
- Issue date Apr 24, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Li Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable nozzle for plasma deposition and a method of controlling...
- Patent number 9,941,100
- Issue date Apr 10, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Ching Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure and method of semiconductor device structure with gate
- Patent number 9,859,113
- Issue date Jan 2, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jing-Yang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus and heat treatment method
- Patent number 9,859,137
- Issue date Jan 2, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Cha Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gap fill self planarization on post EPI
- Patent number 9,831,307
- Issue date Nov 28, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Chang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interlayer dielectric structure with high aspect ratio process (HARP)
- Patent number 9,716,044
- Issue date Jul 25, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Chi Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240312792
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-An HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AMORPHOUS LAYERS FOR REDUCING COPPER DIFFUSION AND METHOD FORMING SAME
- Publication number 20240258160
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON MIGRATION CONTROL IN INTERCONNECT STRUCTURES
- Publication number 20230377955
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD
- Publication number 20220333236
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jia-Wei XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF USING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION CHAMBER
- Publication number 20220270855
- Publication date Aug 25, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Ching WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICES
- Publication number 20220262677
- Publication date Aug 18, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Min CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Amorphous Layers for Reducing Copper Diffusion and Method Forming Same
- Publication number 20220254679
- Publication date Aug 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME
- Publication number 20220190122
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MIGRATION CONTROL IN INTERCONNECT STRUCTURES
- Publication number 20220181203
- Publication date Jun 9, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20210351041
- Publication date Nov 11, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-An HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MIGRATION CONTROL IN INTERCONNECT STRUCTURES
- Publication number 20210233805
- Publication date Jul 29, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION CHAMBER AND METHOD OF...
- Publication number 20210125811
- Publication date Apr 29, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Ching WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Amorphous Layers for Reducing Copper Diffusion and Method Forming Same
- Publication number 20210066122
- Publication date Mar 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-Nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME
- Publication number 20200365695
- Publication date Nov 19, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
- Publication number 20200203473
- Publication date Jun 25, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Li LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20200135868
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hui-An HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICES
- Publication number 20200135553
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsiao-Min CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aluminum-Containing Layers and Methods of Forming the Same
- Publication number 20200090986
- Publication date Mar 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhy-nan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EQUIPMENT MODULE WITH ENHANCED PROTECTION FROM AIRBORNE CONTAMINANT...
- Publication number 20200073258
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Chiang Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION
- Publication number 20190378714
- Publication date Dec 12, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Tsung WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION SYSTEM FOR A MULTILAYER FILM AND METHOD THEREOF
- Publication number 20190187067
- Publication date Jun 20, 2019
- Industrial Technology Research Institute
- Ding-Kun Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEPOSITION DEVICE STRUCTURE
- Publication number 20190032215
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Chan LO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME
- Publication number 20190006474
- Publication date Jan 3, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal Chemical Vapor Deposition System and Operating Method Thereof
- Publication number 20180334747
- Publication date Nov 22, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Chan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device Having a Shallow Trench Isolation Structure an...
- Publication number 20180240698
- Publication date Aug 23, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Li Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING AN ADJUSTABLE NOZZLE AND METHOD OF MAKING A S...
- Publication number 20180226224
- Publication date Aug 9, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Ching WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH PROTECTION LAYER
- Publication number 20180166560
- Publication date Jun 14, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Wei CHIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD, SEMICONDCUTOR PROCESSING APPARATUS HAVING THE SAME AND...
- Publication number 20170283948
- Publication date Oct 5, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Chiang Chiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING APPARATUS AND METHOD OF FORMING COATING FILM
- Publication number 20170157625
- Publication date Jun 8, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lan-Hai WANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
THERMAL CHEMICAL VAPOR DEPOSITION SYSTEM AND OPERATING METHOD THEREOF
- Publication number 20170107619
- Publication date Apr 20, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Chan LO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor devices and semiconductor dev...

Method of using high density plasma chemical vapor deposition chamber

Amorphous layers for reducing copper diffusion and method forming same

Semiconductor device having a multi-layer diffusion barrier and met...

High density plasma chemical vapor deposition chamber and method of...

Method of manufacturing semiconductor devices including formation o...

Amorphous layers for reducing copper diffusion and method forming same

Semiconductor device having multi-layer diffusion barrier and metho...

Electron migration control in interconnect structures

Equipment module with enhanced protection from airborne contaminant...

Method of manufacturing semiconductor devices and semiconductor dev...

Aluminum-containing layers and methods of forming the same

Method of controlling an adjustable nozzle and method of making a s...

Method for controlling plasma in semiconductor fabrication

Coating apparatus and method of forming coating film

Semiconductor device having a shallow trench isolation structure an...

Semiconductor device having a multi-layer diffusion barrier

Thermal chemical vapor deposition system and operating method thereof

Deposition device structure

Showerhead, semicondcutor processing apparatus having the same and...

Detection system for a multilayer film and method thereof using dua...

Method and system for controlling plasma in semiconductor fabrication

Thermal chemical vapor deposition system and operating method thereof

Semiconductor structure with protection layer

Semiconductor device having a shallow trench isolation structure an...

Adjustable nozzle for plasma deposition and a method of controlling...

Structure and method of semiconductor device structure with gate

Substrate heat treatment apparatus and heat treatment method

Gap fill self planarization on post EPI

Interlayer dielectric structure with high aspect ratio process (HARP)

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

AMORPHOUS LAYERS FOR REDUCING COPPER DIFFUSION AND METHOD FORMING SAME

ELECTRON MIGRATION CONTROL IN INTERCONNECT STRUCTURES

SEMICONDUCTOR MANUFACTURING APPARATUS WITH IMPROVED PRODUCTION YIELD

METHOD OF USING HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION CHAMBER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICES

Amorphous Layers for Reducing Copper Diffusion and Method Forming Same

MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME

ELECTRON MIGRATION CONTROL IN INTERCONNECT STRUCTURES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

ELECTRON MIGRATION CONTROL IN INTERCONNECT STRUCTURES

HIGH DENSITY PLASMA CHEMICAL VAPOR DEPOSITION CHAMBER AND METHOD OF...

Amorphous Layers for Reducing Copper Diffusion and Method Forming Same

MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICES

Aluminum-Containing Layers and Methods of Forming the Same

EQUIPMENT MODULE WITH ENHANCED PROTECTION FROM AIRBORNE CONTAMINANT...

METHOD FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION

DETECTION SYSTEM FOR A MULTILAYER FILM AND METHOD THEREOF

DEPOSITION DEVICE STRUCTURE

MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME

Thermal Chemical Vapor Deposition System and Operating Method Thereof

Semiconductor Device Having a Shallow Trench Isolation Structure an...

METHOD OF CONTROLLING AN ADJUSTABLE NOZZLE AND METHOD OF MAKING A S...

SEMICONDUCTOR STRUCTURE WITH PROTECTION LAYER

SHOWERHEAD, SEMICONDCUTOR PROCESSING APPARATUS HAVING THE SAME AND...

COATING APPARATUS AND METHOD OF FORMING COATING FILM

THERMAL CHEMICAL VAPOR DEPOSITION SYSTEM AND OPERATING METHOD THEREOF