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Dingkai Guo
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Danbury, CT, US
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last 30 patents
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Patent Grant
ALD processes for low leakage current and low equivalent oxide thic...
Patent number
10,186,570
Issue date
Jan 22, 2019
Entegris, Inc.
Bryan C. Hendrix
C01 - INORGANIC CHEMISTRY
Patents Applications
last 30 patents
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Patent Application
AMINE CATALYSTS FOR LOW TEMPERATURE ALD/CVD SiO2 DEPOSITION USING H...
Publication number
20170103888
Publication date
Apr 13, 2017
Entegris, Inc.
Dingkai Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
ALD PROCESSES FOR LOW LEAKAGE CURRENT AND LOW EQUIVALENT OXIDE THIC...
Publication number
20150364537
Publication date
Dec 17, 2015
ATMI Korea Co., Ltd
Bryan C. Hendrix
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...